projection photolithography

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• projection photolithography — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia

• optical projection lithography — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• photolithographie de projection — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• Lichtprojektionslithografie — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• Projektionsphotolithographie — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• projekcinė fotolitografija — statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f pranc. photolithographie de …   Radioelektronikos terminų žodynas

• проекционная фотолитография — projekcinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. optical projection lithography; projection photolithography vok. Lichtprojektionslithografie, f; Projektionsphotolithographie, f rus. проекционная фотолитография, f… …   Radioelektronikos terminų žodynas

• Next-generation lithography — (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies slated to replace photolithography. As of 2009 the most advanced form of photolithography is immersion lithography, in which water is used as an… …   Wikipedia

• Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as …   Wikipedia

• Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… …   Wikipedia